English
| Quantity: | |
|---|---|
| Medium requirement: | Clean, dry and non-corrosive gases |
| Type of medium: | Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc. |
| range: | 0- 20,50,100,200,500) SCCM (0~1, 5, 10,50,100, 200, 500, 800) slm |
| precision: | 0.01 sccm,100sccm 1 sccm,1slm 0.01 slm,>5slm |
| distinguishability: | Minimum 0.01SCCM |
| response time: | 10ms |
| repeated accuracy: | ≤±0.2%F.S. |
| Maximum withstand voltage: | 1MPa |
| Body material: | Base: Aviation aluminum alloy (batch optional 316L stainless steel) |
| Shell: aluminum alloy |
| Medium requirement: | Clean, dry and non-corrosive gases |
| Type of medium: | Air, nitrogen, oxygen, carbon dioxide, helium, hydrogen, methane, argon, etc. |
| range: | 0- 20,50,100,200,500) SCCM (0~1, 5, 10,50,100, 200, 500, 800) slm |
| precision: | 0.01 sccm,100sccm 1 sccm,1slm 0.01 slm,>5slm |
| distinguishability: | Minimum 0.01SCCM |
| response time: | 10ms |
| repeated accuracy: | ≤±0.2%F.S. |
| Maximum withstand voltage: | 1MPa |
| Body material: | Base: Aviation aluminum alloy (batch optional 316L stainless steel) |
| Shell: aluminum alloy |
